作者：秦常贵
单位：广东松山职业技术学院，广东韶关 512126
中图分类号：TP212             
文献标识码：A             
文章编号：1006-883X(2020)09-0013-07
收稿日期：2020-06-23

摘要：计量光栅传感器主要用于线位移和角位移的测量。通过辨向电路对莫尔条纹的移动方向进行正确判断，莫尔条纹具有的位移放大作用和误差平均效应使计量光栅传感器具有较高的测量分辨力；对莫尔条纹进行的细分技术，进一步大大提高了计量光栅传感器的测量分辨力，从而使其达到纳米级超高测量分辨力。计量光栅传感器由于具有分辨力极高等一系列优点，因而在数控伺服系统、坐标镗床等高精度数控机床、高精度测试仪器、大规模集成电路制造设备等中被广泛应用。
关键词：计量光栅传感器；超高测量分辨力；莫尔条纹；辨向电路；细分技术

Research and Application of Super-high Measurement Resolution of Measuring Grating Sensor
QIN Chang-gui
Guangdong Songshan Polytechnic College, Shaoguan 512126, China
Abstract: The measuring grating sensor based on the moire fringe phenomenon produced by grating, which is mainly used for the measurement of linear displacement and angular displacement. The measuring grating sensor can judge the moving direction of moire fringe correctly through the direction discrimination circuit, so as to realize the accurate measurement of the measured displacement; the displacement amplification and error average effect of moire fringe make the measurement resolution of measuring grating sensor higher; the subdivision technology of moire fringe further improves the measurement of the measuring grating sensor, the resolution can reach nanoscale. The measuring grating sensor has a series of advantages, such as simple measuring structure, high measuring accuracy, high resolution, large measuring range, strong anti-interference ability and dynamic measurement, so it is widely used in CNC servo system, coordinate boring machine and other high-precision CNC machine tools, high-precision testing instruments, large-scale integrated circuit manufacturing equipment and so on.
Key words: measurement grating sensor; super-high measurement resolution; moire fringe; direction discrimination circuit; subdivision technology; CNC machine tool

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备注：2020年 第26卷 第09期