注：国家自然科学基金（No. 51672103）；
    吉林省科技厅项目（No. 20170101111JC）
作者：李宇星，杨小天，初学峰，迟耀丹
单位：吉林建筑大学电气与计算机学院 吉林省建筑电气综合节能重点实验室，吉林长春 130118
中图分类号：O472             
文献标识码：A        
文章编号：1006-883X(2020)10-0007-09
收稿日期：2020-09-11

摘要：本征氧化锌紫外是目前制备紫外光电探测器件较好的材料，所以近年来人们利用掺杂后的氧化锌半导体材料制备紫外光电探测器件做了很多工作，而纳米结构的半导体材料具有表面积大和特征尺寸的可调节性的优点，随着一维纳米材料，纳米线、纳米棒和二维纳米材料，纳米薄膜，制备工艺的发展，氧化锌基纳米结构的半导体材料引起人们的广泛关注。本文重点介绍了基于一维和二维氧化锌基纳米结构紫外光电探测器件的研究现状，并对未来的研究重点做了简单介绍。
关键词：紫外光电探测器件；氧化锌；一维纳米结构；二维纳米结构

Development and Prospect of Nano ZnO Based UV Photodetectors
LI Yu-xing, YANG Xiao-tian, CHU Xue-feng, CHI Yao-dan, WANG Chao
Jilin University of Construction, School of Electrical and Computer, Jilin Province Key Laboratory of Building Electrical Energy Conservation, Changchun 130118, China
Abstract: Intrinsic zinc oxide ultraviolet is a good material for the preparation of ultraviolet photodetectors. In recent years, a lot of work has been done in the preparation of ultraviolet photodetectors using doped ZnO semiconductor materials. However, nanostructured semiconductor materials have the advantages of large surface area and adjustable characteristic size. With the development of one-dimensional nano materials, nanowires, nanorods and two-dimensional nanometers, many researches have been carried out Materials, nano films, the development of preparation technology, ZnO based nanostructured semiconductor materials have attracted extensive attention. In this paper, the research status of one-dimensional and two-dimensional ZnO based nanostructured UV photodetectors is mainly introduced, and the future research focus is briefly introduced.
Key words: UV Photodetector; Zinc oxide; One-dimensional nanostructure; Two-dimensional nanostructure

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备注：2020年 第26卷 第10期