作者：贺小军，王玉珍，张磊
单位：北京航天试验技术研究所，北京100074
中图分类号：TP212.1            
文献标识码：A            
文章编号：1006-883X(2020)12-0019-04
收稿日期：2020-09-11

摘要：传统的手工测试架检测容栅传感器存在检测效率较低、兼容性较差、人为干扰较大等问题。针对上述问题，通过对高精度自动测试仪的测头托盘、容栅传感器托盘、定栅尺进行改进，从而实现容栅传感器的自动检测。改进后的测试仪可通过更换上述相应的配套结构件，从而实现不同容栅传感器的生产检测，简化生产流程，具有较强的兼容性和可靠性。经验证，该高精度自动测试仪极大地提高了生产效率，可很好地替代传统手工测试架进行容栅传感器的检测。
关键词：容栅传感器；高精度；自动；检测   

Application of Capacitive Grating Sensor Detection Based on High-precision Automatic Tester
HE Xiaojun, WANG Yuzhen, ZHANG Lei
Beijing Institute of Aerospace Testing Technology, Beijing 100074, China
Abstract: The traditional manual test stand has some problems such as low detection efficiency, poor compatibility and human interference. In view of the above problems, this paper improves the probe tray, capacitive grating sensor tray and fixed grid scale of the high-precision automatic tester, so as to realize the automatic detection of capacitive grating sensor. The improved tester can replace the corresponding supporting structural parts to realize the production detection of different capacitive grating sensors, simplify the production process, and have strong compatibility and reliability. After verification, the high-precision automatic tester greatly improves the production efficiency, and can replace the traditional manual test stand for capacitive grating sensordetection.
Key words: capacitive grating sensor; high-precision; automatic; detection

阅读全文

备注：2020年 第26卷 第12期