作者：Jeff Watson
单位：ADI公司
中图分类号：TP212              
文献标识码：B              
文章编号：1006-883X(2021)03-0026-04
收稿日期：2021-03-04

摘要：越来越多的应用需要从处于高温环境中的传感器收集数据。相比同等的分立式传感器，MEMS通常更小巧，功耗和成本都更低。此外，它们还可以在同样大小的半导体封装内集成信号调理电路。除了可以提供高精度倾斜（倾角）测量，还需要更加灵活和自由，以准确测量系统在严苛环境应用下的移动，在这些环境下，最终产品可能遭受冲击、振动和剧烈移动。这种类型的滥用会导致系统过度磨损和提前出现故障，由此产生高额的维护或停机成本。为了满足这一需求，开发了一款集成信号调理功能的高温MEMS陀螺仪，此传感器即使在冲击和振动环境下也能实现准确的角速率（转速）测量，且额定工作温度高达175 ℃。
关键词：MEMS陀螺仪；高温环境；惯性检测；角速度

MEMS Gyroscope Provides Precision Inertial Sensing in Harsh High Temperature Environments
Jeff Watson
ADI
Abstract: There are an increasing number of applications that have a need to gather data from sensors located in very high temperature environments. MEMS sensors often are smaller, lower power, and lower cost than discrete sensor equivalents. In addition, they can also integrate signal conditioning circuitry in the same semiconductor package. Apart from providing high precision tilt (inclination) measurements, there is still a need for additional degrees of freedom to precisely measure movement of the system in harsh environment applications where the end product can be subjected to severe shock, vibration, and violent motion. The type of abuse can cause undue wear and early failure of the system, incurring high cost in maintenance or downtime. To meet this need, Analog Devices has developed a new high temperature MEMS gyroscope with integrated signal conditioning. The sensor enables precision angular rate (rotation speed) measurement even in the presence of shock and vibration and is rated for temperatures up to 175 °C.
Key words: MEMS gyroscope; high temperature environment; inertial sensing; angular velocity

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备注：2021年 第27卷 第03期